Manufacturing of PDMS microfluidic circuits

She is in charge of the whole manufacturing chain of these micro-devices, after definition with the applicant. The main steps in the manufacturing of an impression are :

• shaping of the mask representing the circuit
• deposition of the photosensitive resin on a 3" silicon plate
• UV exposure and revelation of the circuit imprint

This step can be done in two ways: exposure through a mask, or direct laser writing, using a device purchased in 2019 (Dilase by Kloé) and if the applicant wants a finished product...

• molding of PDMS on this impression
• gluing on glass slide
• installation of the fluidic connection

​ ​

​ ​

Below is an example of a SU8 mold before molding with PDMS resin (SU8 thickness of 140microns)

​​